Multilayered Ge/SiGe Material in Microfabricated Thermoelectric Modules

TitleMultilayered Ge/SiGe Material in Microfabricated Thermoelectric Modules
Publication TypeJournal Article
Year of Publication2014
AuthorsSamarelli A., L. Llin F, Cecchi S., Chrastina D., Isella G., Etzelstorfer T., Stangl J., E. Gubler M, Weaver J.MR, Dobson P., Paul D.J
JournalJournal of Electronic Materials
Volume43
Issue10
Pagination3838 - 3843
Date PublishedJan-10-2014
ISSN0361-5235
URLhttp://link.springer.com/10.1007/s11664-014-3233-zhttp://link.springer.com/content/pdf/10.1007/s11664-014-3233-z
DOI10.1007/s11664-014-3233-z
Short TitleJournal of Elec Materi